Standard Heater Stages

Standard Heater Stages

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Sample Heater Stages

Sample Heater Stages - Overview

Thermic Edge offers a complete range of Sample Heater Stages / Hot Stages for all deposition system applications. Heaters and samples can be mounted in any orientation and our range of manipulators provides cost effective options for sample rotation, heater rotation, sample transfer and sample / heater positioning.

SMF01 Sample Heater Stage SMF02 Sample Heater Stage SMF03 Sample Heater Stage SMF04 Sample Heater Stage SMF05 Sample Heater Stage with Heater Head Rotation SMF06 Sample Heater Stage with Outer Cradle Rotation

Features

  • Standard linear shifts with travel up to 250 mm (10”). Longer available as specials.
  • Sample rotation through central shaft or outer cradle.
  • Sample biasing, RF or DC, up to 1000W.
  • Water cooling to protect feedthroughs and / or reduce heat load on the chamber.
  • Configurations for high vacuum, UHV, oxygen, air and corrosive environments.
  • Temperatures up to 1800°C as standard, with higher temperatures achievable on request.
  • Supplied with suitable internal thermocouple to measure control temperature.
  • In vacuum and air side cable assemblies included.
  • Built and tested in the UK.

Sample Heater Stages - Specifications

Standard Features

Feature SMF01 SMF02 SMF03 SMF04 SMF05 SMF06
Max Operating Temperature 1000 1000 1000 1800 1800 1200
Rotating Head No No No No Yes No
Rotating shaft sample holder Yes Yes Yes Yes No Yes
Rotating Cradle sample holder No No No No No Yes
Central Shaft Yes Yes Yes Yes Yes Yes
Motor - belt driven Yes Yes No No Yes Yes
Motor - Direct drive No No Yes Yes No No
Power Feedthroughs Yes No Yes Optional No No
T/C Feedthrough Yes No Yes Optional No No

Optional Features

Feature SMF01 SMF02 SMF03 SMF04 SMF05 SMF06
Water cooling - Base Yes No Yes Yes Yes Yes
Water Cooling - Heatshield Yes Yes Yes Yes Yes Yes
Water Feedthrough Yes No Yes Yes No No
RF / DC Bias Yes Yes No Yes Yes Yes
Z-Shift for sample transfer Yes Yes Yes Yes No Yes
Z shift to move heater head Yes Yes Yes Yes Yes Yes
Z shift to move Sample holder Yes Yes Yes Yes Yes Yes
Linear Movement for Pin Lift No No No Yes No No

Sample Heater Stages FAQs

What are Sample Heater Stages used for?

Sample Heater Stages, also known as Hot Stages, are used in deposition system applications where heating, rotation, transfer or positioning of the sample or heater is required.

Can heaters and samples be mounted in any orientation?

Yes. Thermic Edge Sample Heater Stages allow heaters and samples to be mounted in any orientation.

What movement options are available?

Options include sample rotation, heater rotation, sample transfer, sample positioning, heater positioning and standard linear shifts with travel up to 250 mm, with longer travel available as specials.

Can RF or DC sample biasing be included?

Yes. Sample biasing can be provided as RF or DC up to 1000W, depending on the stage configuration.

What environments can Sample Heater Stages be configured for?

Sample Heater Stages can be configured for high vacuum, UHV, oxygen, air and corrosive environments.

What temperature range is available?

Temperatures up to 1800°C are available as standard, with higher temperatures achievable on request.

What should I include when requesting a quote?

Useful details include the required stage type, operating temperature, environment, rotation requirements, linear travel, sample transfer requirements, RF or DC biasing, water cooling, thermocouple requirements and whether the stage will need to support a specific heater or sample holder. You can contact Thermic Edge through the contact page or email sales@thermic-edge.com.

Request a Quote

Sample Heater Stages - Overview

Thermic Edge offers a complete range of Sample Heater Stages / Hot Stages for all deposition system applications. Heaters and samples can be mounted in any orientation and our range of manipulators provides cost effective options for sample rotation, heater rotation, sample transfer and sample / heater positioning.

Sample Heater Stages - Features:

  • Standard linear shifts with travel up to 250 mm (10”). Longer available as specials.
  • Sample rotation through central shaft or outer cradle.
  • Sample biasing (RF or DC) up to 1000W.
  • Water-cooling to protect feedthroughs and / or reduce heat load on the chamber.
  • Configurations for high vacuum, UHV, oxygen, air and corrosive environments.
  • Temperatures up to 1800°C as standard (higher temperatures can be achieved on request).
  • Supplied with suitable internal thermocouple to measure control temperature.
  • In-vacuum and air side cable assemblies included .
  • Built and tested in the UK.

Sample Heater Stages - Specifications

Standard Features

SMF01SMF02SMF03SMF04SMF05SMF06
Max Operating Temperature100010001000180018001200
Rotating HeadNoNoNoNoYesNo
Rotating shaft sample HolderYesYesYesYesNoYes
Rotating Cradle sample holderNoNoNoNoNoYes
Central ShaftYesYesYesYesYesYes
Motor – belt drivenYesYesNoNoYesYes
Motor – Direct driveNoNoYesYesNoNo
Power FeedthroughsYesNoYesOptionalNoNo
T/C FeedthroughYesNoYesOptionalNoNo

Optional Features

SMF01SMF02SMF03SMF04SMF05SMF06
Water cooling – BaseYesNoYesYesYesYes
Water Cooling – HeatshieldYesYesYesYesYesYes
Water FeedthroughYesNoYesYesNoNo
RF / DC BiasYesYesNoYesYesYes
Z-Shift for sample transferYesYesYesYesNoYes
Z shift to move heater headYesYesYesYesYesYes
Z shift to move Sample holderYesYesYesYesYesYes
Linear Movement for Pin LiftNoNoNoYesNoNo

Request a Quote