Thermic Edge manufacture a wide range of sample heater stages for vacuum, UHV, inert gas, oxygen, air and specialist process environments. Our heater stages are used for research, thin film deposition, surface science, semiconductor processing, materials testing and custom vacuum systems.
From compact button heaters to large diameter wafer stages, each system can be configured with suitable materials, feedthroughs, thermocouples, cooling, rotation, RF biasing and sample handling options.
| Feature | Description |
|---|---|
| Linear travel | Standard linear shifts up to 250 mm / 10", with longer travel available as a special option. |
| Rotation | Sample rotation through a central shaft or outer cradle arrangement. |
| Biasing | RF or DC sample biasing available up to 1000 W. |
| Sample transfer | Lifting pins for base mounted systems, or cradle transfer for top mounted systems. |
| Manipulation options | Manipulation of the sample holder, heater head, or both separately. |
| Water cooling | Protects feedthroughs & helps reduce heat load on the chamber. |
| Flange mounting | Mountable to a wide range of standard & custom flange sizes, including DN, CF, ISO & customer specified interfaces. |
| Process compatibility | Configurations for high vacuum, UHV, oxygen, air & corrosive environments. |
| Temperature range | Up to 1600°C as standard, with higher temperatures available on request. |
| Temperature control | Supplied with a suitable internal thermocouple for control temperature measurement. |
| Cable assemblies | In vacuum & air side cable assemblies included. |
| Manufacture | Built & tested in the UK. |
| Heater Type | Typical Max Temperature | Atmosphere | Best Use |
|---|---|---|---|
| NiCr | 800°C | High Vacuum / Inert / Air | General sample heating & most cost effective |
| SiC Coated Graphite | 1200°C | Oxygen / Air / Reactive Gases / High Vacuum / UHV / Inert | Versatile for all environments |
| Carbon Composite | 1000°C to 1600°C | High Vacuum / Inert Gas Only | High temperature, fast ramping & cost effective |
| PG/PBN | 1000°C | UHV / Vacuum / Inert | Compact, clean heating for small sample scale |
| Custom Heater Stage | Application specific | Application specific | Bespoke chamber integration |
The best heater stage depends on your required temperature, process atmosphere, sample size, vacuum level and any movement or biasing requirements. If you are unsure which heater is most suitable, our team can review your chamber layout and process conditions.
Useful information to provide:
Required sample temperature
Sample size and material
Vacuum level or process pressure
Gas environment
Chamber flange or available mounting space
Any requirement for rotation, RF biasing or sample transfer
StandardStandard heater stages provide up to 250 mm of linear travel and central shaft rotation, with extended options available as custom designs for enhanced flexibility.
Linear MotionA comprehensive suite of linear manipulators and rotary feedthroughs supports diverse motion requirements, offering precise linear shifts and rotational control for sample heating applications.
SampleAll stage variants can include RF and DC biasing of heater stage top plates, enabling precise process control, enhanced plasma performance and compatibility with demanding vacuum environments.
SampleCustom sample transfer stages enable precise, automated movement within heating systems, easily integrated with rotation, biasing, cooling or motion modules for enhanced handling flexibility.
Water and GasWater cooled stages reduce chamber heat load and offer pressure control, flexible mounting and optional inert gas cooling, cutting vent time from roughly 20 minutes to around 4 minutes.
SolarSpecialised vacuum heater stages for solar panel production use base mounted heaters with tilting heads, enabling precise angle control for scalable manufacturing processes.
