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Experts in Substrate Heating

Vacuum Heaters

At Thermic Edge, we pride ourselves on being at the forefront of the vacuum heater industry. Providing a complete service, our bespoke versatile ranges give you the tools necessary for any application.

High Temperature Heaters - High Uniformity, Water Cooled | UHV Heaters

On this page, you will find information on our standard heating solutions that we offer in addition to our Versatile and Button heater ranges. These include:

  • 1000°C graphite or carbon-carbon composite (CCC) inert and vacuum compatible ceramic topped heater
  • 1300°C high uniformity SiC3 coated graphite inert, air and vacuum compatible ceramic topped substrate heater
  • 1700°C CCC inert and vacuum compatible ceramic topped heater (water cooled)
  • 1900°C All Graphite Heaters inert and vacuum compatible

Any of these heaters can be integrated with our stages to provide:

  • Rotable wafer
  • Z-shift
  • RF or DC bias up to 1000W
  • Water or gas cooling

1000°C Ceramic Topped in Vacuum Heater with SiC3 coated graphite or Carbon-Carbon Composite (CCC) Substrate Heaters Inert and Vacuum

Features

  • Top plate temperature is 1000C, element temperature approximately 1200C.
  • For use in high vacuum, UHV, inert atmosphere & O2 environments.
  • Custom sizes available on request.
  • Fast ramp rates
  • Heater includes internal heat shielding
  • Heater base is water cooled, reducing heat load on chamber and sensitive equipment.
  • Heater is fitted with type K ceramic sheathed thermocouple.
  • Can be mounted to linear and or rotary actuator or in any orientation.
  • Heater can be free standing or flange mounted.
  • Water, power and thermocouple services can exit rear of or side of heater base.
  • Ø1” Heater will fit through NW38CF flange fully assembled (middle picture above)
200.06-A - 1000°C CCC Element Heater Head Only
200.07-B - 1000°C CCC Element Heater Flange Mount

1000°C SiC3 Element - Air, O2, Inert, HV, UHV  Heater head only

Part NoØA – Hot ZoneØB – Heater o.d.C – Heater ThicknessMounting*Voltage Max*Current Max*Power Max
HTWM6-SiC-0126mm (1”)36.6mm52mmM6 stud6v39a234w
HTWM6-SiC-01.538.1mm (1.5”)48.7mm52mmM6 stud10v39a390w
HTWM6-SiC-0250.8mm (2”)61.4mm52mmM6 stud15v39a585w

*In Vacuum @ 1000°C (Element Temp.)

1000°C CCC Element - Inert, HV, UHV Heater Head Only

Part NoØA – Hot ZoneØB – Heater o.d.C – Heater ThicknessMounting*Voltage Max*Current Max*Power Max
HTWM6-CCC-0126mm (1”)36.6mm52mmM6 stud6v39a234w
HTWM6-CCC-01.538.1mm (1.5”)48.7mm52mmM6 stud10v39a390w
HTWM6-CCC-0250.8mm (2”)61.4mm52mmM6 stud15v39a585w

*In Vacuum @ 1000°C (Element Temp.)

Customise Your Heater

Contact our technical sales team today if you need any assitance or a larger heater size. Additional options include, but are not limited to:

  • Water cooling to minimise heat load on chamber and other equipment
  • Sample holder clips, masks or retainers
  • Flange or heater stage mounting (for rotation and sample transfer)
  • Sample bias (DC or RF up to 1000W)
  • Second Thermocouple
  • Power Supply
  • Temperature Controller
  • Spare Elements

1300°C High Uniformity SiC3 Coated Graphite Substrate Heaters (Inert, Air, Vacuum)

Our high temperature oxygen resistant heaters using solid Silicon Carbide (SiC) or SiC coated graphite elements

Features

  • Top plate temperature is 1300C, element temperature approximately 1500C.
  • High temperature uniformity of <2% on top plate.
  • Fast ramp rates, up to 1300C per minute (depending on power supply used)
  • 1300°C Ceramic top plate temperature (1500°C element temperature)
  • Can be pushed to 1600C for short periods
  • Limited to 1000°C top plate temperature in high vacuum
  • Temperature uniformity ±1.0%
  • Integrated thermocouple (type depends on usage temperature and environment)
  • Tested with multiple thermocouples and FLIR thermal imaging camera
  • Can be mounted in any orientation
  • Sample can be placed directly onto heater ceramic top plate
  • Certain samples can be placed directly onto the element
  • Standard sizes from Ø1” to Ø8”
  • For use in high vacuum, inert atmosphere and O2 / air
  • Custom shapes and sizes available on request
  • Water cooling as standard
  • Usually mounted on a base flange with integrated power, and water-cooling feedthroughs, but can be customer defined
200.06-A - 1000°C CCC Element Heater Head Only
200.07-B - 1000°C CCC Element Heater Flange Mount
Part NoØ Wafer sizeØA – Hot ZoneØB – Heater o.d.C – Heater Thickness*Voltage Max*Current Max*Power Max
HTSW-CCC-0377mm (3”)901494260251500
HTSW-CCC-04102mm (4”)1161754260402400
HTSW-CCC-05128mm (5”)1412004260603600
HTSW-CCC-06153mm (6”)1662254260804800
HTSW-CCC-07179mm (7”)19225142601106600
HTSW-CCC-08204mm (8”)21827742601408400

*In Vacuum @ 1200°C

Customise Your Heater

Contact our technical sales team today if you need any assitance or a larger heater size. Additional options include, but are not limited to:

  • Water cooling to minimise heat load on chamber and other equipment
  • Sample holder clips, masks or retainers
  • Flange or heater stage mounting (for rotation and sample transfer)
  • Sample bias (DC or RF up to 1000W)
  • Second Thermocouple
  • Power Supply
  • Temperature Controller
  • Spare Elements

1700°C Ceramic Topped in Vacuum Heater with SiC3 coated graphite or Carbon-Carbon Composite (CCC) Substrate Heaters Inert and Vacuum

Our highest standard heaters will operate with a top plate temperature at 1700°C.  The heater size can be increased as required. 

Features

  • 1700°C Ceramic top plate temperature
  • Integrated type C thermocouple
  • Can be mounted in any orientation
  • Ø1” version shown is CF40 flange mounted and fits fully assembled through a Ø38mm port
  • Water-cooled feedthroughs and body as standard
  • Heats to 1700°C top plate temperature in 3 minutes requiring 530W to maintain temperature
  • Sample can be placed directly onto heater ceramic top plate
  • Standard sizes from Ø1” to Ø6”
  • For use in high vacuum or inert atmosphere
  • Custom shapes and sizes available on request
  • Usually mounted on a base flange with integrated power, and water-cooling feedthroughs, but can be custom
200.11-A - 1700°C Heater With CCC Element And Water Cooled Body

1700°C - Inert, HV, UHV – Heater Head Water Cooled

Part NoØA – Hot ZoneØB – Heater o.d.C – Heater ThicknessMountingVoltage MaxCurrent MaxPower Max
HTWM6-CCC-0126mm (1”)36.6mm52mmM6 stud17 volts33 amps561 Watts
HTWM6-CCC-01.538.1mm (1.5”)48.7mm52mmM6 stud40 volts30 amps1200 Watts
HTWM6-CCC-0250.8mm (2”)61.4mm52mmM6 stud60 volts35 amps2100 Watts

*In Vacuum @ 1900°C (Element Temp.)

1700°C – Inert, HV, UHV – Heater Head Water Cooled

Part NoØ Wafer sizeØA – Hot ZoneØB – Heater o.d.C – Heater ThicknessVoltage MaxCurrent MaxPower Max
HTSW-CCC-0377mm (3”)901494260251500
HTSW-CCC-04102mm (4”)1161754260402400
HTSW-CCC-05128mm (5”)1412004260603600
HTSW-CCC-06153mm (6”)1662254260804800
HTSW-CCC-07179mm (7”)19225142601106600
HTSW-CCC-08204mm (8”)21827742601408400

*In Vacuum @ 1200°C

Customise Your Heater

Contact our technical sales team today if you need any assitance or a larger heater size. Additional options include, but are not limited to:

  • Water cooling to minimise heat load on chamber and other equipment
  • Sample holder clips, masks or retainers
  • Flange or heater stage mounting (for rotation and sample transfer)
  • Sample bias (DC or RF up to 1000W)
  • Second Thermocouple
  • Power Supply
  • Temperature Controller
  • Spare Elements

All Graphite Cooled or Uncooled Heater with Graphite or Ceramic Top Plate and CCC Element

Advanced carbon-carbon composite element and high thermal conductivity technical ceramics and graphite grades allow top plate temperatures of up to 1900°C with a very fast ramp rate.

Features

  • Suitable for use in UHV, High vacuum, corrosive or inert atmosphere
  • Enclosed element is protected from deposition products extending lifetime
  • Samples can be placed directly onto heater ceramic / graphite top plate
  • Standard sizes range from Ø1” to Ø6” with larger sizes available as specials
  • Does not require water cooling
  • Dimensionally very stable
  • Can be CVD coated with PBN, SiC3 or PG if required
  • Water cooling available to reduce heat load on chamber and other equipment

All heaters are supplied with power leads and internal thermocouples and can be supplied with power supplies and controllers.

High Temperature Heaters - Downloadables

200.03-A - 1200°C Heater with SiC3 element and water cooled body
200.06-A - 1000°C CCC Element Heater Head Only
200.07-B - 1000°C CCC Element Heater Flange Mount
200.11-A - 1700°C Heater With CCC Element And Water Cooled Body

Our Mission

At Thermic Edge, we pride ourselves on being at the forefront of the Vacuum Heating Technology Industry. We provide a complete service, our bespoke and versatile ranges give you the tools necessary for any inert, HV or UHV application.

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