Experts in Substrate Heating

Vacuum Heaters

At Thermic Edge, we pride ourselves on being at the forefront of the vacuum heater industry. Providing a complete service, our bespoke versatile ranges gives you the tools necessary for any application.

Versatile Heaters Overview

At Thermic Edge, we have developed a range of cost-effective sample heaters that can be easily customised with optional extras, such as water cooling, sample rotation and various sample mounting options.

The heater has high power density (enabling very fast ramp up times), with low mass body (reducing cool down times) and high thermal uniformity over the entire hot zone.

The sample heaters are manufactured using different body and element materials to suit a wide range of applications and temperatures, and are available as standard from two-inch to six-inch diameter.

200.15-E - A3 - Thermic Edge Versatile Heater Range

Verstaile Heater Drawing Downloads

VH-X-1000-GS-O2

Ø2″          PDF
Ø3″          PDF
Ø4″          PDF
Ø6″          PDF

VH-X-1000-CCC-HV

Ø2″          PDF
Ø3″          PDF
Ø4″          PDF
Ø6″          PDF

VH-X-1600-CCC-HV

Ø2″          PDF
Ø3″          PDF
Ø4″          PDF
Ø6″          PDF

Versatile Heaters - Features

  • Standard hot zone sizes ranging from Ø2” (51 mm) up to Ø6” (152 mm)
  • Configurations for high vacuum, UHV and air (oxygen compatible)
  • Standard element materials are Inconel, carbon-carbon composite (CCC), pure silicon carbide (SiC3) CVD coated graphite and tungsten
  • Fast ramping and efficient
  • Supplied with suitable internal thermocouple to measure and control temperature (temperature readers and controllers also available)
  • Free standing or flange mounted

 

  • Can operate in any orientation
  • High uniformity sample heating area as standard (<2%)
  • Water cooling available to minimise heat load on chamber
  • Fully customisable with complete bespoke solutions available
  • Stage mountable where rotation, Z-shift and/or RF or DC bias are required
  • In-vacuum cable assemblies included
  • Built and tested in the UK

These heaters can be supplied flange mounted or fitted to our heater stages.  All heaters are supplied with power leads and internal thermocouples and can be provided with power supplies and controllers providing a complete turnkey solution to your sample heating requirements.

Sample plate rotates above static element. In this example, clips are used to secure the substrates

Thermic Edge supply plates with apertures to hold and provide masking to samples if required.

Heaters can be used with the element exposed, and some cases samples can be placed directly onto elements

Versatile Heaters - Customise Your Heater

Contact our technical sales team today if you need any assistance or a larger heater size. Additonal Options include, but are not limited to:

  • Water cooling to minimise heat load on chamber and other equipment
  • Sampe holder clips, masks or retainers
  • Flange or heater stage mouting (for rotation and sample transfer)
  • Sample bias (DC or RF up to 1000W)
  • Second thermocouple
  • Power Supply
  • Temperature Controller
  • Spare elements

1000°C ceramic top plate temperature with CCC element. For use in High vacuum, N2 or inert atmosphere

Part No.Hot zone ØO.D.(approx.)Ceramic Top PlateTC type
VH-2-1000-CCC-HV2″100 mmABN1000K
VH-3-1000-CCC-HV3″125 mmABN1000K
VH-4-1000-CCC-HV4″160 mmABN1000K
VH-6-1000-CCC-HV6″190 mmABN1000K

1000°C ceramic top plate temperature with graphite and SiC3 CVD coated element. For use in High vacuum, O2, N2, H2 environment or Air

Part No.Hot zone ØO.D.(approx.)Ceramic Top PlateTC type
VH-2-1000-GS-O22″100 mmABN1000K
VH-3-1000-GS-O23″125 mmABN1000K
VH-4-1000-GS-O24″160 mmABN1000K
VH-6-1000-GS-O26″190 mmABN1000K

1600°C ceramic top plate temperature with CCC element. For use in High vacuum, N2 or inert atmosphere.

Part No.Hot zone ØO.D.(approx.)Ceramic Top PlateTC type
VH-2-1600-CCC-HV2″100 mmPBNC
VH-3-1600-CCC-HV3″125 mmPBNC
VH-4-1600-CCC-HV4″160 mmPBNC
VH-6-1600-CCC-HV6″190 mmPBNC

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Click for Nickel Chrome (NiCr). For smaller heaters, see our Button Heater page.