Experts in Substrate Heating

Stage Heaters / Deposition Stages

At Thermic Edge, we pride ourselves on being at the forefront of the Bespoke Heater Stage industry. Providing a complete service, our bespoke versatile ranges gives you the tools necessary for any application.

Sample Transfer

Thermic Edge provide solutions for sample transfer for all deposition system applications. We work closely with our customers to integrate our sample heater stages with their loading systems. Stages can be top or bottom mounted, with manual or automatic sample loading / wafer transfer.

See our Heater Stages brochure for more information on sample transfer.

Features

  • Heaters and samples can be mounted in any orientation
  • Our standard range of Z-shifts or pin lift provides cost effective sample transfer solutions
  • Standard linear shifts with travel up to 250 mm (10”)
  • Outer cradle sample rotation for high temperature uniformity across sample
  • High precision servo / stepper motors allow home positioning for loading and unloading
  • Proximity sensors and micro switches for defining Z position and rotation position (required for stepper motors)
  • Configurations for high vacuum, UHV, oxygen, air and corrosive environments
  • Temperatures up to 1600°C as standard (higher temperatures can be achieved on request)
  • Fully customisable with complete bespoke solutions available
  • Built and tested in the UK

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