Standard heater stages provide up to 250 mm of linear travel and central-shaft rotation, with extended options available as custom designs for enhanced flexibility.
A comprehensive suite of linear manipulators and rotary feedthroughs supports diverse motion requirements, offering precise linear shifts and rotational control for sample heating applications.
All stage variants can include RF and DC biasing of heater stage top plates, enabling precise process control, enhanced plasma performance, and compatibility with demanding vacuum environments.
Custom sample transfer stages enable precise, automated movement within heating systems, easily integrated with rotation, biasing, cooling, or motion modules for enhanced handling flexibility.
Water-cooled stages reduce chamber heat load and offer pressure control, flexible mounting, and optional inert gas cooling, cutting vent time from ~20 to ~4 minutes.
Specialised vacuum heater stage tailored for solar panel production: base-mounted heaters with tilting heads enable precise angle control for scalable manufacturing processes.
