SiC Coated Graphite Elements
Based in the UK we export around 90% of our Sic Coated Graphite around the world.
In this article, we focus on Silicon Carbide Coated Elements which will be offered as flat elements or as assemblies as required for substrate heating, illustrated below.
We have developed a range of high purity silicon carbide coated elements from 1” to 8” as part of a standard range which will be introduced next month.
The elements are compatible with UHV heaters, High Vacuum heaters and Inert Atmosphere heaters. The elements will operate consistently at 1450°C and for short periods up to 1600°C.
Thermic Edge Ltd are the sole manufacturers of SiC3, short for cubic silicon carbide. The process is unique as it combines a well defined crystal size, isotropic structure and low surface roughness. The high growth rates achieved by SiC3 ensures that the product remains cost effective. Layer thickness can be varied but typically a layer of 80 – 100µm is achieved.
The Sic Coating has excellent oxidisation, corrosion and chemical resistance. The high purity Sic coating is achieved by using only the purest of ingredients in the coating process.
The combination of Isotropic graphite and our Sic Coating is stable and uniform at high temperatures.
As we know, graphite oxides in air starting around 450°C Therefore, we have designed an element assembly whereby the power connecting is removed from the hot zone to ensure that the exposed graphite (required for the power connection) will be below the oxidisation temperature.
It is possible to order bespoke legs with a standard element to suit your heater requirements.
Examples of SiC Coated Graphite Applications
Susceptors used in processes that form the epitaxial layer on semiconductor wafers with heating element used in substrate heating
The coating can be used in semiconductor, aerospace and heating technologies. It will provide a high purity and impervious layer on graphite, porous ceramics and composites. The combination of graphite selection and graphite machining expertise, developed by Thermic Edge, will ensure that customers experience optimal support for various critical components within these industries
If you want to know more please contact us through our website or just give us a call to discuss High purity Sic Coating.
