• Substrate Heater Overview
  • Versatile Sample Heaters

Thermic Edge supply cost-effective, high uniformity sample heaters to research and industry for thin film deposition and sample processing.  Sample heaters can be supplied with retainers or clips to hold a range of semiconductor wafers or samples.

Features:

  • Standard direct contact sample heaters are available for sample sizes ranging from one inch (25.4 mm) up to six inch (152.4 mm) hot zones. Larger sizes available as special designs
  • Lamp heaters are supplied for radiating heating applications
  • Configurations for high vacuum, UHV, oxygen, air and corrosive environments
  • Standard element materials are Inconel, nickel chrome (NiCr), carbon-carbon composite (CCC), pure silicon carbide (SiC3) CVD coated graphite and tungsten
  • Temperatures up to 1600°C as standard (higher temperatures can be achieved on request)
  • Fast ramping and efficient
  • Supplied with suitable internal thermocouple to measure control temperature
  • Free standing, stud mounted or flange mounted
  • Basic elements up to complete systems
  • Good uniformity sample heating area as standard (<±2%). Extra high uniformity range (<±1%)
  • Water cooling available to minimise heat load on chamber
  • Larger sizes and different shapes available on request
  • Fully customisable with complete bespoke solutions available
  • Stage mountable where rotation, Z-shift and RF or DC bias are required
  • In-vacuum and air side cable assemblies included
  • Built and tested in the UK

View our range of versatile heaters and other standard heaters to find the heater for your application. Get in touch with our technical sales team today if you need any assistance or a larger heater size.

 

Committed to quality

All heaters go through comprehensive testing. Our in-house testing capabilities include helium leak checking, full temperature testing using vacuum test system and uniformity testing using a FLIR thermal imaging camera. Thermic Edge are ISO 9001:2015 registered.

 

Sample Heating Stages

Thermic Edge offers a complete range of sample heating hot stages for all thin film deposition system applications. Heaters and samples can be mounted in any orientation and the Thermic Edge range of manipulators provides cost effective options for sample rotation, heater rotation, sample transfer and sample/heater positioning.

 

Sample heating stages can be offered with sample biasing (RF or DC) up to 1000W and complete with temperature controller and power supply. For heaters and stages with RF biasing, full shielding and power/thermocouple line filtering can be supplied. Water cooled heaters can be supplied with chillers.

 

View range of standard stage configurations here.

 

Bespoke

Thermic Edge specialise in providing bespoke solutions for heating applications that cannot be fulfilled using standard heaters and stages. The Thermic Edge design team works closely with clients to provide:

  • Professionally managed projects
  • Cost effective solutions using standard Thermic Edge components and assemblies where possible
  • Detailed technical drawings and written specifications
  • 3D CAD models (if required)
  • A heating solution that is supplied fully tested and ready to integrate with your system
  • Manual detailing installation, specification and operation instruction

   

Versatile Sample Heaters

Thermic Edge have developed a range of cost-effective sample heaters that can be easily customised with optional extras, such as water cooling, sample rotation and various sample mounting options. The heater is also very high performance, with high power density (enabling very fast ramp up times), with low mass body (reducing cool down times) and high thermal uniformity over the entire hot zone. The sample heaters are manufactured using different body and element materials to suit a wide range of applications and temperatures, and are available as standard from two-inch to six-inch diameter:

VH-X-800-IN-O2

Ø2 PDF                             Ø3 PDF                            Ø4 PDF                             Ø6 PDF

VH-X-1000-GS-O2

Ø2 PDF                             Ø3 PDF                            Ø4 PDF                             Ø6 PDF

VH-X-1000-CCC-HV

Ø2 PDF                             Ø3 PDF                            Ø4 PDF                             Ø6 PDF

VH-X-1600-CCC-O2

Ø2 PDF                             Ø3 PDF                            Ø4 PDF                             Ø6 PDF
  • Sample plate rotates above static element. In this example, clips are used to secure the substrates.
  • Thermic Edge supply plates with apertures to hold and provide masking to samples if required.
  • Heaters can be used with the element exposed, and some cases samples can be placed directly onto elements.
  • Standard hot zone sizes ranging from Ø2” (51 mm) up to Ø6” (152 mm)·Configurations for high vacuum, UHV and air (oxygen compatible)
  • Standard element materials are Inconel, carbon-carbon composite (CCC), pure silicon carbide (SiC3) CVD coated graphite and tungsten
  • Fast ramping and efficient
  • Supplied with suitable internal thermocouple to measure and control temperature (temperature readers and controllers also available)
  • Free standing or flange mounted
  • Can operate in any orientation·High uniformity sample heating area as standard (<2%)
  • Water cooling available to minimise heat load on chamber
  • Fully customisable with complete bespoke solutions available
  • Stage mountable where rotation, Z-shift and/or RF or DC bias are required
  • In-vacuum cable assemblies included
  • Built and tested in the UK

Contact our technical sales team today if you need any assistance or a larger heater size. Additional Options include, but are not limited to:

  • Water cooling to minimise heat load on chamber and other equipment
  • Sampe holder clips, masks or retainers
  • Flange or heater stage mouting (for rotation and sample transfer)
  • Sample bias (DC or RF up to 1000W)
  • Second thermocouple
  • Power Supply
  • Temperature Controller
  • Spare elements

Download our full brochure here

You will find Nickel Chrome (NiCr) and lamp heaters within our Standard Heaters page. For smaller heaters, see our Button Heater page.

Part No. Hot zone Ø O.D. (approx.) Ceramic Top Plate TC type
VH-2-800-IN-O2 2″ 100 mm ABN1000 K
VH-3-800-IN-O2 3″ 125 mm ABN1000 K
VH-4-800-IN-O2 4″ 160 mm ABN1000 K
VH-6-800-IN-O2 6″ 190 mm ABN1000 K

800°C ceramic top plate temperature with Inconel element. For use in High vacuum, O2, N2, H2 environment or Air.

 

 

Part No. Hot zone Ø O.D. (approx.) Ceramic Top plate TC type
VH-2-1000-GS-O2 2″ 100 mm ABN1000 K
VH-3-1000-GS-O2 3″ 125 mm ABN1000 K
VH-4-1000-GS-O2 4″ 160 mm ABN1000 K
VH-6-1000-GS-O2 6″ 190 mm ABN1000 K

1000°C ceramic top plate temperature with graphite and SiC3 CVD coated element. For use in High vacuum, O2, N2, H2 environment or Air.

 

 

Part No. Hot zone Ø O.D. (approx.) Ceramic Top plate TC type
VH-2-1000-CCC-HV 2″ 100 mm ABN1000 K
VH-3-1000-CCC-HV 3″ 125 mm ABN1000 K
VH-4-1000-CCC-HV 4″ 160 mm ABN1000 K
VH-6-1000-CCC-HV 6″ 190 mm ABN1000 K

1000°C ceramic top plate temperature with CCC element. For use in High vacuum, N2 or inert atmosphere.

 

 

Part No. Hot zone Ø O.D. (approx.) Ceramic Top plate TC type
VH-2-1600-CCC-HV 2″ 100 mm PBN C
VH-3-1600-CCC-HV 3″ 125 mm PBN C
VH-4-1600-CCC-HV 4″ 160 mm PBN C
VH-6-1600-CCC-HV 6″ 190 mm PBN C

1600°C ceramic top plate temperature with CCC element. For use in High vacuum, N2 or inert atmosphere.

 

 

Part No. Hot zone Ø O.D. (approx.) Ceramic Top plate TC type
VH-2-1600-TU-UHV 2″ 100 mm PBN C
VH-3-1600-TU-UHV 3″ 125 mm PBN C
VH-4-1600-TU-UHV 4″ 160 mm PBN C
VH-6-1600-TU-UHV 6″ 190 mm PBN C

1600°C ceramic top plate temperature with tungsten element. For use in High vacuum, N2, H2 or inert atmosphere. Good for UHV with top plate removed.

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