• Substrate Heater Overview
  • Versatile Heaters
  • Button Heaters
  • Standard Sample Heaters
  • All Graphite Heaters
  • PG-PBN Heaters
  • Bespoke Heaters

Substrate Heater Overview

Thermic Edge supply cost-effective, high uniformity sample heaters to research and industry for thin film deposition and sample processing.  Sample heaters can be supplied with retainers or clips to hold a range of semiconductor wafers or samples.

Features

  • Standard direct contact sample heaters are available for sample sizes ranging from one inch (25.4 mm) up to six inch (152.4 mm) hot zones. Larger sizes available as special designs
  • Lamp heaters are supplied for radiating heating applications
  • Configurations for high vacuum, UHV, oxygen, air and corrosive environments
  • Standard element materials are Inconel, nickel chrome (NiCr), carbon-carbon composite (CCC), pure silicon carbide (SiC3) CVD coated graphite and tungsten
  • Temperatures up to 1600°C as standard (higher temperatures can be achieved on request)
  • Fast ramping and efficient
  • Supplied with suitable internal thermocouple to measure control temperature
  • Free standing, stud mounted or flange mounted
  • Basic elements up to complete systems
  • Good uniformity sample heating area as standard (<±2%). Extra high uniformity range (<±1%)
  • Water cooling available to minimise heat load on chamber
  • Larger sizes and different shapes available on request
  • Fully customisable with complete bespoke solutions available
  • Stage mountable where rotation, Z-shift and RF or DC bias are required
  • In-vacuum and air side cable assemblies included
  • Built and tested in the UK

View our range of versatile heaters and other standard heaters to find the heater for your application. Get in touch with our technical sales team today if you need any assistance or a larger heater size.

Bespoke

Thermic Edge specialise in providing bespoke solutions for heating applications that cannot be fulfilled using standard heaters and stages. The Thermic Edge design team works closely with clients to provide:

Manual detailing installation, specification and operation instructions.

  • Professionally managed projects
  • Cost effective solutions using standard Thermic Edge components and assemblies where possible
  • Detailed technical drawings and written specifications
  • 3D CAD models (if required)
  • A heating solution that is supplied fully tested and ready to integrate with your system

Committed to quality

All heaters go through comprehensive testing. Our in-house testing capabilities include helium leak checking, full temperature testing using vacuum test system and uniformity testing using a FLIR thermal imaging camera. Thermic Edge are ISO 9001:2015 registered.

Sample Heating Stages

Thermic Edge offers a complete range of sample heating hot stages for all thin film deposition system applications. Heaters and samples can be mounted in any orientation and the Thermic Edge range of manipulators provides cost effective options for sample rotation, heater rotation, sample transfer and sample/heater positioning.

Sample heating stages can be offered with sample biasing (RF or DC) up to 1000W and complete with temperature controller and power supply. For heaters and stages with RF biasing, full shielding and power/thermocouple line filtering can be supplied. Water cooled heaters can be supplied with chillers.

Versatile Sample Heaters

Thermic Edge have developed a range of cost-effective sample heaters that can be easily customised with optional extras, such as water cooling, sample rotation and various sample mounting options. The heater is also very high performance, with high power density (enabling very fast ramp up times), with low mass body (reducing cool down times) and high thermal uniformity over the entire hot zone. The sample heaters are manufactured using different body and element materials to suit a wide range of applications and temperatures, and are available as standard from two-inch to six-inch diameter:

VH-X-800-IN-O2

Ø2 PDF                             Ø3 PDF                            Ø4 PDF                             Ø6 PDF

VH-X-1000-GS-O2

Ø2 PDF                             Ø3 PDF                            Ø4 PDF                             Ø6 PDF

VH-X-1000-CCC-HV

Ø2 PDF                             Ø3 PDF                            Ø4 PDF                             Ø6 PDF

VH-X-1600-CCC-O2

Ø2 PDF                             Ø3 PDF                            Ø4 PDF                             Ø6 PDF
  • Sample plate rotates above static element. In this example, clips are used to secure the substrates.
  • Thermic Edge supply plates with apertures to hold and provide masking to samples if required.
  • Heaters can be used with the element exposed, and some cases samples can be placed directly onto elements.
  • Standard hot zone sizes ranging from Ø2” (51 mm) up to Ø6” (152 mm)·Configurations for high vacuum, UHV and air (oxygen compatible)
  • Standard element materials are Inconel, carbon-carbon composite (CCC), pure silicon carbide (SiC3) CVD coated graphite and tungsten
  • Fast ramping and efficient
  • Supplied with suitable internal thermocouple to measure and control temperature (temperature readers and controllers also available)
  • Free standing or flange mounted
  • Can operate in any orientation·High uniformity sample heating area as standard (<2%)
  • Water cooling available to minimise heat load on chamber
  • Fully customisable with complete bespoke solutions available
  • Stage mountable where rotation, Z-shift and/or RF or DC bias are required
  • In-vacuum cable assemblies included
  • Built and tested in the UK

Contact our technical sales team today if you need any assistance or a larger heater size. Additional Options include, but are not limited to:

  • Water cooling to minimise heat load on chamber and other equipment
  • Sampe holder clips, masks or retainers
  • Flange or heater stage mouting (for rotation and sample transfer)
  • Sample bias (DC or RF up to 1000W)
  • Second thermocouple
  • Power Supply
  • Temperature Controller
  • Spare elements

You will find Nickel Chrome (NiCr) and lamp heaters within our Standard Heaters page. For smaller heaters, see our Button Heater page.

Part No. Hot zone Ø O.D. (approx.) Ceramic Top Plate TC type
VH-2-800-IN-O2 2″ 100 mm ABN1000 K
VH-3-800-IN-O2 3″ 125 mm ABN1000 K
VH-4-800-IN-O2 4″ 160 mm ABN1000 K
VH-6-800-IN-O2 6″ 190 mm ABN1000 K

800°C ceramic top plate temperature with Inconel element. For use in High vacuum, O2, N2, H2 environment or Air.

 

 

Part No. Hot zone Ø O.D. (approx.) Ceramic Top plate TC type
VH-2-1000-GS-O2 2″ 100 mm ABN1000 K
VH-3-1000-GS-O2 3″ 125 mm ABN1000 K
VH-4-1000-GS-O2 4″ 160 mm ABN1000 K
VH-6-1000-GS-O2 6″ 190 mm ABN1000 K

1000°C ceramic top plate temperature with graphite and SiC3 CVD coated element. For use in High vacuum, O2, N2, H2 environment or Air.

 

 

Part No. Hot zone Ø O.D. (approx.) Ceramic Top plate TC type
VH-2-1000-CCC-HV 2″ 100 mm ABN1000 K
VH-3-1000-CCC-HV 3″ 125 mm ABN1000 K
VH-4-1000-CCC-HV 4″ 160 mm ABN1000 K
VH-6-1000-CCC-HV 6″ 190 mm ABN1000 K

1000°C ceramic top plate temperature with CCC element. For use in High vacuum, N2 or inert atmosphere.

 

 

Part No. Hot zone Ø O.D. (approx.) Ceramic Top plate TC type
VH-2-1600-CCC-HV 2″ 100 mm PBN C
VH-3-1600-CCC-HV 3″ 125 mm PBN C
VH-4-1600-CCC-HV 4″ 160 mm PBN C
VH-6-1600-CCC-HV 6″ 190 mm PBN C

1600°C ceramic top plate temperature with CCC element. For use in High vacuum, N2 or inert atmosphere.

 

 

Part No. Hot zone Ø O.D. (approx.) Ceramic Top plate TC type
VH-2-1600-TU-UHV 2″ 100 mm PBN C
VH-3-1600-TU-UHV 3″ 125 mm PBN C
VH-4-1600-TU-UHV 4″ 160 mm PBN C
VH-6-1600-TU-UHV 6″ 190 mm PBN C

1600°C ceramic top plate temperature with tungsten element. For use in High vacuum, N2, H2 or inert atmosphere. Good for UHV with top plate removed.

Button Heaters

The new Thermic Edge Button Heater range offers a new approach to sample heating. The sample heater is very versatile enabling it to be easily upgraded, so that body or element materials can be easily changed to suit different heating requirements and environments. The sample heater layout can be easily modified to allow for different sample mounting options. The heater is also very high performance, with high power density (enabling very fast ramp up times), with low mass body (reducing cool down times) and high thermal uniformity over the entire hot zone. The button heater is manufactured using different body and element materials to suit a wide range of applications and temperatures.

  • Standard one-inch hot zone (smaller available as a special)
  • Configurations for high vacuum, UHV, oxygen, air and corrosive environments
  • Temperatures up to 1400°C as standard (higher temperatures can be achieved on request)
  • Fast ramping and efficient
  • Supplied with suitable internal thermocouple to measure and control temperature
  • Supplied with M6 stud or flange mounted
  • Can be mounted in any orientation
  • High uniformity sample heating area as standard (<2%)
  • Fully customisable with complete bespoke solutions available
  • Stage mountable where rotation, Z-shift and RF or DC bias are required
  • In-vacuum and air side cable assemblies included
  • Built and tested in the UK

These heaters can be supplied flange mounted or fitted to our heater stages.  All heaters are supplied with power leads and internal thermocouples and can be provided with power supplies and controllers providing a complete turnkey solution to your sample heating requirements.

Configuration Examples

Contact our technical sales team today if you need any assistance. Additonal Options include, but are not limited to:

  • Water cooling to minimise heat load on chamber and other equipment
  • Sampe holder clips, masks or retainers
  • Flange or heater stage mouting (for rotation and sample transfer)
  • Sample bias (DC or RF up to 1000W)
  • Power Supply
  • Power Controller
  • Spare elements

You will find Nickel Chrome (NiCr) and lamp heaters within our Standard Heaters page. Larger standard heaters can be found on our versatile heaters page

 

Order Codes

Heater Ref: Element Heatshields Body TC Max Temp** Power Environment
VB-1-0800-KA-O2 Kanthal Nickel 316 st/stl K 800   °c 240 W O2, Air
800   °c 140 W Vac (HV), O2
VB-1-1000-TA-HV Tantalum Moly Moly K 1000 °c 300 W Vac (HV)
VB-1-1400-TA-UV Moly Moly C 1400 °c 400 W Vac (UHV)
VB-1-1400-TR-UV Tungsten-

Rhenium

Tungsten Tungsten C 1400 °c 500 W H2, N2, UHV
VB-1-1000-PR-O2 Platinum-

Rhodium

Nickel 316 st/stl K 1000 °c 240 W Vac (HV), O2

Standard Sample Heaters

On this page, you will find information on our standard sample heating solutions that we offer in addition to our Versatile and Button heater ranges. These include:

  • 800°C nickel chrome inert, air and vacuum compatible ceramic topped substrate heater
  • 900°C halogen lamp inert, air and vacuum compatible sample heaters
  • 1000°C graphite or carbon-carbon composite (CCC) inert and vacuum compatible ceramic topped heater
  • 1500°C high uniformity SiC3 coated graphite inert, air and vacuum compatible ceramic topped substrate heater
  • 1700°C CCC inert and vacuum compatible ceramic topped heater (water cooled)

Any of these heaters can be integrated with our stages to provide:

  • Rotable Wafer
  • Z-shift
  • RF or DC Bias up to 1000W
  • Water or Gas Cooling

Nickel Chrome Substrate Heaters (Inert, Air and High Vacuum)

Cost effective and versatile

  • 800°C Ceramic top plate temperature (1000°C Element temperature)
  • Integrated type K thermocouple
  • Ramp rate up to 400°C per Minute
  • Can be mounted in any orientation
  • Sample can be placed directly onto heater ceramic top plate
  • Standard sizes from Ø1” to Ø8”
  • For use in high vacuum, inert atmosphere and O2 / air
  • Custom shapes and sizes available on request
  • Can be used as direct replacement for Halogen lamp heaters
  • Easily adapted for special larger sizes and square / rectangular heater requirements
  • Usually supplied with M6 stud for mounting, but can be flange mounted or free standing

Optional Extras

  • Additional outer heatshield
  • Water cooling of additional outer heatshield and / or base
  • Flange Mounted and power feedthroughs
Part No ØA – Hot Zone (mm) ØB – Heater O.D. (mm) C – Heater Thickness (mm) O.D. cooled shield OPTION (mm)
HCM6-NCR-02 52 66 25 92
HCM6-NCR-03 78 92 25 118
HCM6-NCR-04 105 119 25 145
HCM6-NCR-05 129 143 25 169
HCM6-NCR-06 156 170 25 196
HCM6-NCR-07 179 193 25 219
HCM6-NCR-08 205 219 25 245

Halogen Lamp Substrate Heaters (Inert, Air and Vacuum)

Non-contact substrate heater

  • 900°C sample temperature
  • Integrated type K thermocouple
  • Can be mounted in any orientation
  • Standard sizes Ø2”, Ø3” and Ø4”
  • For use in high vacuum, inert atmosphere or air
  • Specially designed for an easy access to bulbs by removing the outer shield
  • Custom shapes and sizes available on request

Graphite or Carbon-Carbon Composite (CCC) Substrate Heaters (Inert and Vacuum)

For higher temperatures

  • 1000°C Ceramic top plate temperature (1200°C element temperature)
  • Integrated type K thermocouple
  • Can be mounted in any orientation
  • Sample can be placed directly onto heater ceramic top plate
  • Standard sizes from Ø1” to Ø8”
  • For use in high vacuum and inert atmosphere
  • Custom shapes and sizes available on request
  • Can be used as direct replacement for Halogen lamp heaters
  • Easily adapted for special larger sizes and square / rectangular heater requirements
  • Usually mounted on a base flange with integrated power and thermocouple feedthroughs, but can be customer defined

High Uniformity SiC3 Coated Graphite Substrate Heaters (Inert, Air and Vacuum)

Our high temperature oxygen resistant heaters using solid Silicon Carbide (SiC) or SiC coated graphite elements

  • 1300°C Ceramic top plate temperature (1500°C element temperature)
  • Can be pushed to 1600C for short periods
  • Limited to 1000°C top plate temperature in high vacuum
  • Temperature uniformity ±1.0%
  • Integrated thermocouple (type depends on usage temperature and environment)
  • Tested with multiple thermocouples and FLIR thermal imaging camera
  • Can be mounted in any orientation
  • Sample can be placed directly onto heater ceramic top plate
  • Certain samples can be placed directly onto the element
  • Standard sizes from Ø1” to Ø8”
  • For use in high vacuum, inert atmosphere and O2 / air
  • Custom shapes and sizes available on request
  • Water cooling as standard
  • Usually mounted on a base flange with integrated power, and water-cooling feedthroughs, but can be customer defined

Carbon-Carbon Composite Graphite Substrate Heaters (Inert and Vacuum)

Our highest temperature standard substrate heater

  • 1700°C Ceramic top plate temperature
  • Integrated type C thermocouple
  • Can be mounted in any orientation
  • Ø1” version shown is CF40 flange mounted and fits fully assembled through a Ø38mm port
  • Water-cooled feedthroughs and body as standard
  • Heats to 1700°C top plate temperature in 3 minutes requiring 530W to maintain temperature
  • Sample can be placed directly onto heater ceramic top plate
  • Standard sizes from Ø1” to Ø6”
  • For use in high vacuum or inert atmosphere
  • Custom shapes and sizes available on request
  • Usually mounted on a base flange with integrated power, and water-cooling feedthroughs, but can be customer defined

All Graphite Heaters

All Graphite Cooled or Uncooled Heater with Graphite or Ceramic Top Plate and CCC Element

Advanced carbon-carbon composite element and high thermal conductivity technical ceramics and graphite grades allow top plate temperatures of up to 1900°C with a very fast ramp rate.

Features:

  • Suitable for use in UHV, High vacuum, corrosive or inert atmosphere
  • Enclosed element is protected from deposition products extending lifetime
  • Samples can be placed directly onto heater ceramic / graphite top plate
  • Standard sizes range from Ø1” to Ø6” with larger sizes available as specials
  • Does not require water cooling
  • Dimensionally very stable
  • Can be CVD coated with PBN, SiC3 or PG if required
  • Water cooling available to reduce heat load on chamber and other equipment

All heaters are supplied with power leads and internal thermocouples and can be supplied with power supplies and controllers.

These graphite heaters can be supplied flange mounted or fitted to our heater stages. Get in touch with our technical sales team today if you need any assistance or a larger heater size.

PG-PBN Heaters

Low Mass Ceramic Composite (PBN / PG / PBN) Element

The Thermic Edge offer PG-PBN heaters for applications where fast temperature ramping is required in a reactive environment. A pyrolytic graphite (PG) element track is formed on a pyrolytic boron nitride (PBN) substrate. The track is then covered in PBN to insulate and protect it. Standard heaters sizes are shown in the table below. All heaters are supplied with power leads and thermocouples and can be supplied with power supplies and controllers. These heaters can be supplied flange mounted or fitted to our heater stages.

Features

  • 1400°C maximum temperature in vacuum
  • 900°C maximum temperature in air
  • High vacuum, UHV and corrosive environments
  • Very fast ramp rate, with low mass
  • Very inert
  • PG element is encapsulated in PBN completely protected from deposition product
  • Sample can be placed directly onto heater ceramic element plate
  • Available in sizes up to 4” square or round

Get in touch with our technical sales team today if you need any assistance or a larger heater size. Note: customisation is possible

For element only requirements, Thermic Edge has range of PG-PBN elements or are able to design the element and heater to your project or system requirements.

Bespoke Heaters

Thermic Edge specialises in providing bespoke solutions for heating applications that cannot be fulfilled using standard heaters and stages. These heaters can be any shape to suit your application.

Options include, but are not limited to:

  • Customisable shape
  • Small and large diameter heaters
  • Tubular heaters
  • Rectangular heaters<
  • Materials to suit application and environment
  • Top plates with RF or DC bias
  • Gas cooling
  • Temperatures up to 1900°C
  • Professionally managed projects from start to finish
  • Cost effective solutions using standard Thermic Edge components and assemblies where possible
  • Detailed technical drawings and written specifications
  • 3D CAD models
  • A heating solution that is supplied fully tested and ready to integrate with your system
  • Manual detailing installation and operation instructions

Sample Biasing

Thermic Edge can provide heaters with RF sample bias up to 1000W and DC sample bias up to 1000W for sample preparation and to improve the quality and purity of thin films.

Where the option of RF or DC biasing is required, Thermic Edge will also provide airside RF shielded cabling and filters.

We also produce biased hot stages, with sample rotation, tilting, and automatic or manual sample transfer.

 

200.15-E – A3 – Thermic Edge Versatile heater range REV 4

Versatile Heater Range

Download

200.01-C – A4 – 1 Inch Versatile Ceramic-Topped Button Head Heater

Button Head Heater

Download

Contact

  • This field is for validation purposes and should be left unchanged.
×