The Challenge: Heating + Control in Vacuum
Modern vacuum systems demand more than just temperature.
Whether you’re processing wafers, annealing thin films, or characterising materials, you need:
– Accurate heating with tight thermal uniformity
– Movement stages that maintain vacuum integrity
– Real-time sample control: lift, rotate, transfer
– Biasing, cooling, and electrical feeds – all safely integrated
– Custom mounting to suit chambers and flanges
The Solution: Modular Stage Systems, Built Around You
Heater Stages
Graphite, SiC, CCC or tungsten hot zones rated up to 1800°C. Ideal for thin film deposition (CVD/ALD/PVD), Crystal growing, Vacuum annealing or semiconductor manufacture.
Sample Transfer Systems
Z-shift, tilt, and rotary stages – manual or motor-driven – to position and manipulate samples without breaking vacuum.
Biasing Options
DC or RF sample biasing up to 1000W, complete with shielding and feedthroughs for in-situ activation or surface control.
Water & Gas Cooling Modules
Integrated cooling to protect components and stabilise performance during high-temperature or prolonged testing cycles.
Standard and Custom Stages
Choose from our pre-designed platforms or commission a stage built to your exact specification.
