• 1000c Ceramic Topped Water Cooled Sample Heater - Flange Mount
  • 1000c Ceramic Topped Water Cooled Sample Heater - Head Only

Features

  • Top plate temperature is 1000C, element temperature approximately 1200C.
  • High temperature uniformity of <2% on top plate.
  • Water cooled body to reduce heat load to chamber and power connection points.
  • Range of element options: Carbon Carbon Composite (CCC), SiC Coated Graphite, PBN coated Graphite, PBN/PG/PBN ceramic composite, Refractory Metal
  • Fast ramp rates, up to 1300C per minute (depending on power supply used)
  • For use in high vacuum, UHV, inert atmosphere or O2 (with SiC coated graphite element).
  • Type K thermocouple is spring mounted to ensure constant pressure during thermal cycling.
  • Element head is detachable for in chamber mounting through small ports.
  • Can be mounted in any orientation.
  • Higher temperatures available as a special design.
  • Custom sizes available on request.
  • Lift pin holes available as an option
  • Thermal imaging reports supplied with all heaters
Part No

ØA – Hot Zone

ØB – Heater o.d. C – Heater Thickness D- Length standard flange Voltage Max Current Max

Power Max

HTFW-CCC-03

77mm (3”)

90 149 42 60 25

1500

HTFW-CCC-04

102mm (4”)

116 175 42 60 40

2400

HTFW-CCC-05

128mm (5”)

141 200 42 60 60

3600

HTFW-CCC-06

153mm (6”)

166 225 42 60 80

4800

HTFW-CCC-07

179mm (7”)

192 251 42 60 110

6600

HTFW-CCC-08

204mm (8”)

218 277 42 60 140

8400

Use following codes to specify element type:- -CCC- for carbon composite / -GSC- for graphite + SiC coating / -GPB- for graphite + PBN coating

Power, voltage and current figures are an indication only. Heaters can be made with different voltages and power densities.

Features
  • Top plate temperature is 1000C, element temperature approximately 1200C.
  • High temperature uniformity of <2% on top plate.
  • Water cooled body to reduce heat load to chamber and power connection points.
  • Range of element options: Carbon Carbon Composite (CCC), SiC Coated Graphite, PBN/PG/PBN ceramic composite, Refractory metal
  • Fast ramp rates, up to 1300C per minute (depending on power supply used)
  • For use in high vacuum, UHV, inert atmosphere or O2 (with SiC coated graphite element).
  • Type K thermocouple is spring mounted to ensure constant pressure during thermal cycling.
  • Can be mounted in any orientation.
  • Higher temperatures available as a special design.
  • Custom sizes available on request.
  • Lift pin holes available as an option
  • Thermal imaging reports supplied with all heaters

Part No

Ø Wafer size ØA – Hot Zone ØB – Heater o.d. C – Heater Thickness Voltage Max Current Max Power Max

HTSW-CCC-03

77mm (3”) 90 149 42 60 25 1500

HTSW-CCC-04

102mm (4”)

116 175 42 60 40

2400

HTSW-CCC-05

128mm (5”) 141 200 42 60 60

3600

HTSW-CCC-06

153mm (6”) 166 225 42 60 80

4800

HTSW-CCC-07 179mm (7”) 192 251 42 60 110

6600

HTSW-CCC-08 204mm (8”) 218 277 42 60 140

8400

Use following codes to specify element type:- -CCC- for carbon composite / -GSC- for graphite + SiC coating / -GPB- for graphite + PBN coating.                                                                        Power, voltage and current figures are an indication only. Heaters can be made with different voltages and power densities.

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